Nitrogen TriFluoride 三氟化氮 (NF3)
Total Purity 純度：>99.999%
Vapor Phase Impurities
氣相雜質(zhì)
|
Contaminants 雜質(zhì) |
|
Specifications (ppmv) 規(guī)格 |
|
Ar+O2 |
Argon+Oxygen 氬氣+氧氣 |
<1.0 |
|
N2 |
Nitrogen 氮氣 |
<1.0 |
|
CF4 |
Halocarbon-14 四氟化碳 |
<10 |
|
CO2 |
Carbon Dioxide 二氧化碳 |
<1.0 |
|
N2O |
Nitrous Oxide 氧化亞氮 |
<1.0 |
|
SF6 |
Sulfur Hexafluoride 六氟化硫 |
<1.0 |
|
CO |
Carbon Monoxide 一氧化碳 |
<1.0 |
|
HF |
Hydrogen Fluride |
<1.0 |
|
H2O |
Moisture 水 |
<1.0 |
Standard Package Information
包裝規(guī)格
|
Cylinder Type氣瓶規(guī)格 |
47?, Bundle, Y-cylinder, 20ft ISO-Container, 40ft ISO-Container |
|
Fill Weight充裝量 (kg) |
20, 320, 200, 4200, 8000 |
|
Valve Connection 閥門(DISS) |
640 |